Properties of InGaAs/InP thermoelectric and surface bulk micromachined infrared sensors
نویسندگان
چکیده
منابع مشابه
Properties of InGaAs/InP thermoelectric and surface bulk micromachined infrared sensors
We present a concept for the realization of InGaAs/InP micromachined thermoelectric sensors. The advantages of InGaAs lattice matched to InP combine perfectly for this application. The high selectivity of wet chemical etching of InP against InGaAs is ideally suited for surface bulk micromachining. Thermoelectric InGaAs sensors profit from the high thermal resistivity combined with high electric...
متن کاملModeling the Thermoelectric Properties of Bulk and Nanocomposite Thermoelectric Materials
Thermoelectric materials are materials which are capable of converting heat directly into electricity. They have long been used in specialized fields where high reliability is needed, such as space power generation. Recently, certain nanostructured materials have been fabricated with high thermoelectric properties than those of commercial bulk materials, leading to a renewed interest in thermoe...
متن کاملBulk Micromachined Pressure Sensor
Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices.
متن کاملSurface-Micromachined Thermal Conductivity Gas Sensors For Hydrogen Detection
The undersigned hereby certify that they have read and recommend to the Fac-a thesis entitled " Surface-Micromachined Thermal Conductivity Gas Sensors for Hydrogen Detection " by Shuoxi Chen in partial fulfillment of the requirements for the degree of Master of Science.
متن کاملsome properties of fuzzy hilbert spaces and norm of operators
in this thesis, at first we investigate the bounded inverse theorem on fuzzy normed linear spaces and study the set of all compact operators on these spaces. then we introduce the notions of fuzzy boundedness and investigate a new norm operators and the relationship between continuity and boundedness. and, we show that the space of all fuzzy bounded operators is complete. finally, we define...
15 صفحه اولذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 1996
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.116832